Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...
| Main Authors: | , |
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| Format: | Online |
| Language: | English |
| Published: |
MDPI
2015
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327095/ |