Noise evaluation of a point autofocus surface topography measuring instrument
In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as out...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2018
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| Online Access: | http://eprints.nottingham.ac.uk/50365/ http://eprints.nottingham.ac.uk/50365/ http://eprints.nottingham.ac.uk/50365/ http://eprints.nottingham.ac.uk/50365/1/revised_manuscript.pdf |