Measurement noise of a point autofocus surface topography instrument
Optical instruments for areal topography measurement can be especially sensitive to noise when scanning is required. Such noise has different sources, including those internally generated and external sources from the environment [1].For some instruments, it is not always possible to evaluate each s...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
|
| Online Access: | http://eprints.nottingham.ac.uk/44022/ http://eprints.nottingham.ac.uk/44022/1/MP%202.pdf |