Investigation of Microholes Produced by Focused Ion Beam Micromachining

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...

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Bibliographic Details
Main Authors:	Mohd. Fuad, Nurul Hajar, Ali, Mohammad Yeakub
Other Authors:	Adesta, Erry Yulian Triblas
Format:	Book Chapter
Language:	English
Published:	Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM 2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2517/ http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf

id	iium-2517
recordtype	eprints
spelling	iium-25172012-02-01T06:02:09Z http://irep.iium.edu.my/2517/ Investigation of Microholes Produced by Focused Ion Beam Micromachining Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole‘s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM Adesta, Erry Yulian Triblas Yaacob, Iskandar Idris Ali, Mohammad Yeakub Maleque, Md. Abdul Mohamed Ariff, Tasnim Firdaus 2010 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf Mohd. Fuad, Nurul Hajar and Ali, Mohammad Yeakub (2010) Investigation of Microholes Produced by Focused Ion Beam Micromachining. In: Materials Processing and Precision Engineering. Series 1 . Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM, Malaysia, pp. 92-97.
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub Investigation of Microholes Produced by Focused Ion Beam Micromachining
description	This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole‘s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio.
author2	Adesta, Erry Yulian Triblas
author_facet	Adesta, Erry Yulian Triblas Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub
format	Book Chapter
author	Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub
author_sort	Mohd. Fuad, Nurul Hajar
title	Investigation of Microholes Produced by Focused Ion Beam Micromachining
title_short	Investigation of Microholes Produced by Focused Ion Beam Micromachining
title_full	Investigation of Microholes Produced by Focused Ion Beam Micromachining
title_fullStr	Investigation of Microholes Produced by Focused Ion Beam Micromachining
title_full_unstemmed	Investigation of Microholes Produced by Focused Ion Beam Micromachining
title_sort	investigation of microholes produced by focused ion beam micromachining
publisher	Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM
publishDate	2010
url	http://irep.iium.edu.my/2517/ http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf
first_indexed	2018-09-07T03:01:19Z
last_indexed	2018-09-07T03:01:19Z
_version_	1610916067327082496

Investigation of Microholes Produced by Focused Ion Beam Micromachining

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