Focused ion beam micromachining: technology and application
Main Authors: | , , , |
---|---|
Format: | Book Chapter |
Language: | English |
Published: |
IIUM Press
2011
|
Subjects: | |
Online Access: | http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf |