Nano-scale elastic–plastic properties and indentation-induced deformation of amorphous silicon carbide thin film
Controllable low-temperature (500 °C) deposition of amorphous a-SiC ceramic films on Si(100) was achieved using a pulsed dc-magnetron puttering system in a mixture of CH4/Ar. The nanoscale elastic-plastic response of the film upon contact loading was systematically characterized and analyzed by dept...
| Main Authors: | , , , |
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| Format: | Journal Article |
| Published: |
Elsevier Science Ltd
2017
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| Online Access: | http://hdl.handle.net/20.500.11937/8785 |