Fabrication of Thin-Film LAPS with Amorphous Silicon
To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous...
| Main Authors: | , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Molecular Diversity Preservation International (MDPI)
2004
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4008868/ |