Study of the effect of substrate bias on the electrical properties of sputtered HfO2 thin film deposited on silicon substrate

Study of the effect of substrate bias on the electrical properties of sputtered HfO2 thin film deposited on silicon substrate

Bibliographic Details
Main Authors: R.K., Nahar, Aparna, Sharma
Format: text
Language:eng
Published: Emerald 2007
Subjects:
Thin films,Substrates,Electrical conductivity

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