R.K., N., & Aparna, S. (2007). Study of the effect of substrate bias on the electrical properties of sputtered HfO2 thin film deposited on silicon substrate. Emerald.
Chicago Style CitationR.K., Nahar, and Sharma Aparna. Study of the Effect of Substrate Bias On the Electrical Properties of Sputtered HfO2 Thin Film Deposited On Silicon Substrate. Emerald, 2007.
MLA CitationR.K., Nahar, and Sharma Aparna. Study of the Effect of Substrate Bias On the Electrical Properties of Sputtered HfO2 Thin Film Deposited On Silicon Substrate. Emerald, 2007.
Warning: These citations may not always be 100% accurate.