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Wahab, K.I.A.
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Wahab, K.I.A.
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Wahab, K.I.A.
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The characterization of KrF photoresists and the effect of different chromophore bulkiness on line edge roughness (LER) for submicron technology
by
Yusri, A.
,
Bakri, M.
,
Manaf, M.J.
,
Wahab
,
K.I.A
.
,
Ahmad, I.B.
Published 2017
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