Reka bentuk dan fabrikasi sensor tekanan LC-MEMS berasaskan membran PMMA-Grafin

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Reka bentuk dan fabrikasi sensor tekanan LC-MEMS berasaskan membran PMMA-Grafin

Keperluan untuk pengesanan tekanan tanpa wayar, berskala kecil, ringan dan berprestasi tinggi telah mendorong penyelidikan semasa untuk menumpukan perhatian pada peranti sensor tekanan sistem mikro-elektro-rnekanikal (MEMS). Pada masa kini, pembangunan sensor tekanan induktif-kapasitif (LC) ME...

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Bibliographic Details
Main Author:	Norliana binti Yusof (Author)
Corporate Author:	Universiti Kebangsaan Malaysia . Institut Kejuruteraan Mikro & Nanoelektronik
Format:	Thesis Book
Language:	Malay
Subjects:	Universiti Kebangsaan Malaysia > Faculty of Science and Technology > Dissertations Universiti Kebangsaan Malaysia > Dissertations Detectors > Industrial applications Microelectromechanical systems > Industrial applications Dissertations, Academic

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