Reka bentuk dan fabrikasi sensor tekanan LC-MEMS berasaskan membran PMMA-Grafin

Reka bentuk dan fabrikasi sensor tekanan LC-MEMS berasaskan membran PMMA-Grafin

Bibliographic Details
Main Author: Norliana binti Yusof (Author)
Corporate Author: Universiti Kebangsaan Malaysia Institut Kejuruteraan Mikro & Nanoelektronik
Format: Book
Language:Malay
Subjects:
Universiti Kebangsaan Malaysia > Faculty of Science and Technology > Dissertations
Universiti Kebangsaan Malaysia > Dissertations
Detectors > Industrial applications
Microelectromechanical systems > Industrial applications
Description
Physical Description:xviii, 190 leaves 31 cm

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