Advanced Ta-based diffusion barriers for Cu interconnects [

Bibliographic Details
Main Author: Heubner, Renae (Author)
Format: Book
Language:English
Published: New York : Nova Science Publishers , c2009
Subjects:
Online Access:NetLibrary

MARC

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008 110228s2009 nyu eng
020 |a 1607416751 (electronic bk.) 
020 |a 9781604564518 
020 |a 9781607416753 (electronic bk.) 
050 0 0 |a TK7874.53   |b .H83 2009 
090 0 0 |a TK7874.53   |b .H83 2009 
100 1 |a Heubner, Renae ,   |e author 
245 1 0 |a Advanced Ta-based diffusion barriers for Cu interconnects [  |h electronic resource]   |c Renae Heubner 
260 |a New York :   |b Nova Science Publishers ,   |c c2009 
300 |a 1 online resource (93 p.) :   |b ill 
500 |a Description based on print version record 
504 |a Includes bibliographical references (p [73]-86) and index 
650 0 |a Electrodiffusion 
650 0 |a Integrated circuits 
650 0 |a Interconnects (Integrated circuit technology) 
856 4 0 |3 NetLibrary   |u http://www.netlibrary.com/urlapi.asp?action=summary&v=1&bookid=281179 
999 |a 1000137141   |b Electronic Resource   |c OPEN SHELF (30 DAYS)   |e Gong Badak Campus