APA (7th ed.) Citation

Heubner, R. (2009). Advanced Ta-based diffusion barriers for Cu interconnects [. Nova Science Publishers.

Chicago Style (17th ed.) Citation

Heubner, Renae. Advanced Ta-based Diffusion Barriers for Cu Interconnects [. New York: Nova Science Publishers, 2009.

MLA (9th ed.) Citation

Heubner, Renae. Advanced Ta-based Diffusion Barriers for Cu Interconnects [. Nova Science Publishers, 2009.