Advanced MEMS packaging [

This book presents the latest and cutting-edge MEMS (Microelectromechanical systems) packaging techniques such as low-temperature bonding and 3D packaging

Bibliographic Details
Main Author: Lau, John H. (Author)
Format: Book
Language:English
Published: New York : McGraw-Hil , c2010
Subjects:
Online Access:NetLibrary

MARC

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005 20180108093000.0
008 110227s2010 nyu eng
020 |a 0071626239 (alk. paper) 
020 |a 0071627928 (NetLibrary e-ISBN) 
020 |a 0071741836 (McGraw-Hill e-ISBN) 
020 |a 9780071626231 (alk. paper) 
020 |a 9780071627924 (NetLibrary e-ISBN) 
020 |a 9780071741835 (McGraw-Hill e-ISBN) 
050 0 0 |a TK7875   |b .A378 2010 
090 0 0 |a TK7875   |b .A378 2010 
245 1 0 |a Advanced MEMS packaging [  |h electronic resource]   |c John H Lau ... [et al.] 
260 |a New York :   |b McGraw-Hil ,   |c c2010 
300 |a 1 online resource (xxiii, 552 p.) :   |b ill 
500 |a Description based on print version record 
504 |a Includes bibliographical references and index 
505 0 |a 1. Enabling technologies for advanced MEMS packaging -- 2. Advanced MEMS wafer-level packaging -- . Optical MEMS packaging : communications -- 4. Optical MEMS packaging : bubble switch -- 5. Optical MEMS : microbolometer packaging -- 6. Bio-MEMS packaging -- 7. Biosensor packaging --8. Accelerometer packaging -- 9. Radiofrequency MEMS switches -- 10. RF MEMS tunable capacitors and tubable band-pass filters -- 11. Advanced packaging of RF MEMS devices 
520 |a This book presents the latest and cutting-edge MEMS (Microelectromechanical systems) packaging techniques such as low-temperature bonding and 3D packaging 
650 0 |a Microelectromechanical systems 
650 0 |a Microelectronic packaging 
700 1 |a Lau, John H. ,   |e author 
856 4 0 |3 NetLibrary   |u http://www.netlibrary.com/urlapi.asp?action=summary&v=1&bookid=291511 
999 |a 1000137065   |b Electronic Resource   |c OPEN SHELF (30 DAYS)   |e Gong Badak Campus