Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 : editors, Davig G. Seiler ...[et al.]

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Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 :

Bibliographic Details
Main Author:	Seiler, David G. (Author)
Corporate Authors:	International Conference on Characterization and Metrology for ULSI Technology, National Institute of Standards and Technology
Format:	Book
Published:	Melville, NY : American Institute of Physics , c2003
Subjects:	Integrated circuits > Ultra large scale integration > Congresses Integrated circuits > Ultra large scale integration > Congresses > Software

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