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00000cam a2200000 7i4500 |
| 001 |
0000047519 |
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20230404093000.0 |
| 008 |
040920s2003 |
| 020 |
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|a 0735401527
|
| 090 |
0 |
0 |
|a TK7874.76
|b .I56 2003 kit
|
| 110 |
1 |
|
|a International Conference on Characterization and Metrology for ULSI Technology
|c 2003
|c Austin, Texas
|
| 245 |
1 |
0 |
|a Characterization and metrology for ULSI technology :
|b 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 :
|b editors, Davig G. Seiler ...[et al.]
|f sponsoring organizations, National Institute of Standards and Technology ... [et al.]
|
| 260 |
2 |
|
|a Melville, NY :
|b American Institute of Physics ,
|c c2003
|
| 300 |
|
|
|a xviii. 818 p. :
|b ill. ;
|c 28 cm.
|e 1 CD-ROM (4 3/4 in.)
|
| 504 |
|
|
|a Includes bibliographical references and index
|
| 650 |
|
0 |
|a Integrated circuits
|x Ultra large scale integration
|v Congresses
|
| 650 |
|
0 |
|a Integrated circuits
|x Ultra large scale integration
|v Congresses
|x Software
|
| 700 |
0 |
|
|a Seiler, David G. ,
|e author
|
| 710 |
1 |
1 |
|a National Institute of Standards and Technology
|
| 999 |
|
|
|a 1000099628
|b Book
|c OPEN SHELF (30 DAYS)
|e Tembila Campus
|
| 999 |
|
|
|a 1000099629
|b CD-ROM
|c OPEN SHELF (30 DAYS)
|e Tembila Campus
|