Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 : editors, Davig G. Seiler ...[et al.]

Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 :

Bibliographic Details
Main Author: Seiler, David G. (Author)
Corporate Authors: International Conference on Characterization and Metrology for ULSI Technology, National Institute of Standards and Technology
Format: Book
Published: Melville, NY : American Institute of Physics , c2003
Subjects:
Integrated circuits > Ultra large scale integration > Congresses
Integrated circuits > Ultra large scale integration > Congresses > Software
Description
Physical Description:xviii. 818 p. : ill. ; 28 cm. 1 CD-ROM (4 3/4 in.)
Bibliography:Includes bibliographical references and index
ISBN:0735401527

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