Seiler, D. G. (2003). Characterization and metrology for ULSI technology: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003. American Institute of Physics.
Chicago Style (17th ed.) CitationSeiler, David G. Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003. Melville, NY: American Institute of Physics, 2003.
MLA (9th ed.) CitationSeiler, David G. Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003. American Institute of Physics, 2003.
Warning: These citations may not always be 100% accurate.