MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly

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MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly

Bibliographic Details
Main Author:	Behringer, Uwe F.W (Author)
Corporate Author:	The International Society for Optical Engineering
Format:	Book
Published:	Washington SPIE c2003
Series:	SPIE proceedings series 4945
Subjects:	Mechatronics > Congresses Microelectromechanical systems > Technological innovations > Congresses Microelectronic packaging > Technological innovations > Congresses Optical communications > Technological innovations > Congresses Optoelectronic devices > Design and construction > Congresses

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