MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly

MEMS/MOEMS advances in photonic commmunications, sensing, metrology, packaging and assembly

Bibliographic Details
Main Author: Behringer, Uwe F.W (Author)
Corporate Author: The International Society for Optical Engineering
Format: Book
Published: Washington SPIE c2003
Series:SPIE proceedings series 4945
Subjects:
Mechatronics > Congresses
Microelectromechanical systems > Technological innovations > Congresses
Microelectronic packaging > Technological innovations > Congresses
Optical communications > Technological innovations > Congresses
Optoelectronic devices > Design and construction > Congresses

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Call Number: TK7875 M45 2003
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