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| 001 |
0000047199 |
| 005 |
20080102093000.0 |
| 008 |
040628s2003 |
| 020 |
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|a 0819447404
|
| 090 |
0 |
0 |
|a TK7875
|b M45 2003
|
| 245 |
1 |
0 |
|a MEMS/MOEMS :
|b advances in photonic commmunications, sensing, metrology, packaging and assembly
|
| 260 |
2 |
|
|a Washington :
|b SPIE ,
|c c2003
|
| 300 |
|
|
|a vii, 203 p. :
|b ill ;
|c 28 cm.
|
| 440 |
0 |
0 |
|a SPIE proceedings series
|v 4945
|
| 504 |
|
|
|a Includes bibliographical references and author index.
|
| 650 |
|
0 |
|a Mechatronics
|x Congresses
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Technological innovations
|x Congresses
|
| 650 |
|
0 |
|a Microelectronic packaging
|x Technological innovations
|x Congresses
|
| 650 |
|
0 |
|a Optical communications
|x Technological innovations
|v Congresses
|
| 650 |
|
0 |
|a Optoelectronic devices
|x Design and construction
|v Congresses
|
| 700 |
1 |
|
|a Behringer, Uwe F.W. ,
|e author
|
| 710 |
1 |
1 |
|a The International Society for Optical Engineering
|
| 740 |
0 |
0 |
|a Proceedings of SPIE
|
| 999 |
|
|
|a 1000099377
|b Book
|c Close Access
|e Gong Badak Campus
|