MEMS/MOEMS : advances in photonic commmunications, sensing, metrology, packaging and assembly

MEMS/MOEMS : advances in photonic commmunications, sensing, metrology, packaging and assembly

Bibliographic Details
Main Author: Behringer, Uwe F.W (Author)
Corporate Author: The International Society for Optical Engineering
Format: Book
Published: Washington : SPIE , c2003
Series:SPIE proceedings series 4945
Subjects:
Mechatronics > Congresses
Microelectromechanical systems > Technological innovations > Congresses
Microelectronic packaging > Technological innovations > Congresses
Optical communications > Technological innovations > Congresses
Optoelectronic devices > Design and construction > Congresses
Description
Physical Description:vii, 203 p. : ill ; 28 cm.
Bibliography:Includes bibliographical references and author index.
ISBN:0819447404

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