APA (7th ed.) Citation

Behringer, U. F. (2003). MEMS/MOEMS: Advances in photonic commmunications, sensing, metrology, packaging and assembly. SPIE.

Chicago Style (17th ed.) Citation

Behringer, Uwe F.W. MEMS/MOEMS: Advances in Photonic Commmunications, Sensing, Metrology, Packaging and Assembly. Washington: SPIE, 2003.

MLA (9th ed.) Citation

Behringer, Uwe F.W. MEMS/MOEMS: Advances in Photonic Commmunications, Sensing, Metrology, Packaging and Assembly. SPIE, 2003.