Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz

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Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz

Bibliographic Details
Main Author:	Schmitz, John E. J. (Author)
Format:	Book
Published:	Park Ridge, N. J. : Noyes Publications , c1992
Subjects:	Integrated circuits > Very large scale integration > Materials Tungsten Vapor-planting

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