Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz
| Main Author: | |
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| Format: | Book |
| Published: |
Park Ridge, N. J.
Noyes Publications
c1992
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| Subjects: |
Badak General Collection
| Call Number: |
TK7871 15 T85 S36 1991 |
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| Accession | Item Category | Format | Status | Notes |
|---|
| 1000043135 | OPEN SHELF (30 DAYS) | Book | Available |