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00000cam a2200000 7i4500 |
| 001 |
0000026151 |
| 005 |
20021119093000.0 |
| 008 |
021119n |
| 020 |
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|a 0815512880
|
| 090 |
0 |
0 |
|a TK7871.15.T85
|b S36 1991
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| 100 |
0 |
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|a Schmitz, John E. J. ,
|e author
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| 245 |
0 |
0 |
|a Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz
|
| 260 |
2 |
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|a Park Ridge, N. J. :
|b Noyes Publications ,
|c c1992
|
| 300 |
|
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|a xvi, 235 p. ; ;
|c 25 cm.
|
| 504 |
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|a Includes bibliographical references and index
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| 650 |
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0 |
|a Integrated circuits
|x Very large scale integration
|x Materials
|
| 650 |
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0 |
|a Tungsten
|
| 650 |
|
0 |
|a Vapor-planting
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| 999 |
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|a 1000043135
|b Book
|c OPEN SHELF (30 DAYS)
|e Gong Badak Campus
|