Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz
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| Format: | Book |
| Published: |
Park Ridge, N. J. :
Noyes Publications ,
c1992
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| Subjects: |
| Physical Description: | xvi, 235 p. ; ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0815512880 |