Schmitz, J. E. J. (1992). Chemical vapor depossition of tungsten and tungsten silicides for VLSI/ULSI applications / by John E. J. Schmitz. Noyes Publications.
Chicago Style (17th ed.) CitationSchmitz, John E. J. Chemical Vapor Depossition of Tungsten and Tungsten Silicides for VLSI/ULSI Applications / by John E. J. Schmitz. Park Ridge, N. J: Noyes Publications, 1992.
MLA (9th ed.) CitationSchmitz, John E. J. Chemical Vapor Depossition of Tungsten and Tungsten Silicides for VLSI/ULSI Applications / by John E. J. Schmitz. Noyes Publications, 1992.
Warning: These citations may not always be 100% accurate.