Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

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Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...

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Bibliographic Details
Main Authors:	Fang, Fengzhou Z., Venkatesh, Vasisht,C., Zhang, G.X.
Format:	Article
Language:	English
Published:	Springer Verlag 2002
Subjects:	TP Chemical technology
Online Access:	http://eprints.utm.my/7388/ http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf

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