Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Springer Verlag
2002
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/7388/ http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf |