Effect on silicon nitride thin films properties at various powers of RF magnetron sputtering

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Effect on silicon nitride thin films properties at various powers of RF magnetron sputtering

Silicon nitride thin films have numerous applications in microelectronics and optoelectronics fields due to their unique properties. In this work, silicon nitride thin films were produced using radio frequency (R.F.) magnetron sputtering technique at various sputtering powers. The prepared thin film...

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Bibliographic Details
Main Authors:	Mustafa, Mohd Kamarulzaki, Majeed, Uzair, Iqbal, Younas
Format:	Article
Published:	Science Publishing Corporation 2018
Subjects:	TK7800-8360 Electronics TP155-156 Chemical engineering
Online Access:	http://eprints.uthm.edu.my/4514/

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