Effect on silicon nitride thin films properties at various powers of RF magnetron sputtering
Silicon nitride thin films have numerous applications in microelectronics and optoelectronics fields due to their unique properties. In this work, silicon nitride thin films were produced using radio frequency (R.F.) magnetron sputtering technique at various sputtering powers. The prepared thin film...
| Main Authors: | , , |
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| Format: | Article |
| Published: |
Science Publishing Corporation
2018
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/4514/ |