Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it...
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/4374/ http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf |
| _version_ | 1848887025345757184 |
|---|---|
| author | Kok, Swee Leong White, Neil Nick, Harris |
| author_facet | Kok, Swee Leong White, Neil Nick, Harris |
| author_sort | Kok, Swee Leong |
| building | UTeM Institutional Repository |
| collection | Online Access |
| description | Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels. |
| first_indexed | 2025-11-15T19:47:49Z |
| format | Conference or Workshop Item |
| id | utem-4374 |
| institution | Universiti Teknikal Malaysia Melaka |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T19:47:49Z |
| publishDate | 2008 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utem-43742015-05-28T02:41:30Z http://eprints.utem.edu.my/id/eprint/4374/ Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique Kok, Swee Leong White, Neil Nick, Harris TK Electrical engineering. Electronics Nuclear engineering Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf Kok, Swee Leong and White, Neil and Nick, Harris (2008) Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique. In: Electroceramics XI, 1 - 3 September 2008, Manchester, UK.. http://www.mendeley.com/research/freestanding-pbzr-tio3-thickfilms-prepared-by-a-onestep-air-cofiring-technique/ |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Kok, Swee Leong White, Neil Nick, Harris Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title | Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title_full | Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title_fullStr | Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title_full_unstemmed | Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title_short | Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique |
| title_sort | free-standing pb(zr, ti)o3 thick-films prepared by a one-step air co-firing technique |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://eprints.utem.edu.my/id/eprint/4374/ http://eprints.utem.edu.my/id/eprint/4374/ http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf |