Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique
Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/4374/ http://eprints.utem.edu.my/id/eprint/4374/1/Manuscript.pdf |