A Thick-film Piezoelectric Multimorph Cantilever
Free-standing thick-film cantilevers have the potential to be used as micro-generators as well as self-generating resonant sensors. Earlier versions of free-standing devices were implemented by fabricating in the form of multilayer structures. Instead of structures with a plate of PZT sandwiched bet...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/4373/ http://eprints.utem.edu.my/id/eprint/4373/1/Dielectrics_2009.pdf |