Wafer map defect pattern classification using deep learning model

Wafer maps are generated during wafer testing in the semiconductor manufacturing process. They contain valuable information that helps engineers identify faults in the fabrication process. Classification of defect patterns is necessary to identify the root cause of die failures, and deep learning mo...

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Bibliographic Details
Main Author: Lim, Yu Pin
Format: Final Year Project / Dissertation / Thesis
Published: 2023
Subjects:
Online Access:http://eprints.utar.edu.my/6038/
http://eprints.utar.edu.my/6038/1/fyp_CS_2023_LYP.pdf