Design And Fabrication Of A Projectionlithography Machine For The Application Of Microfluidic Pattern Using Commercially Available UV LED

Design And Fabrication Of A Projectionlithography Machine For The Application Of Microfluidic Pattern Using Commercially Available UV LED

In the present work, a 12µm PDMS microfluidic channel are developed using an in-house designed projection lithography machine system. A master pattern was first produce by patterning on microscope slide which is spin coated with SU-8 2002 negative photoresist and exposing it with the in-house proj...

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Bibliographic Details
Main Author: Zulkifli, Zikri
Format: Monograph
Language:English
Published: Universiti Sains Malaysia 2018
Subjects:
T Technology
TJ Mechanical engineering and machinery
Online Access:http://eprints.usm.my/54166/
http://eprints.usm.my/54166/1/Design%20And%20Fabrication%20Of%20A%20Projectionlithography%20Machine%20For%20The%20Application%20Of%20Microfluidic%20Pattern%20Using%20Commercially%20Available%20UV%20Led_Zikri%20Zulkifli_M4_2018.pdf

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http://eprints.usm.my/54166/
http://eprints.usm.my/54166/1/Design%20And%20Fabrication%20Of%20A%20Projectionlithography%20Machine%20For%20The%20Application%20Of%20Microfluidic%20Pattern%20Using%20Commercially%20Available%20UV%20Led_Zikri%20Zulkifli_M4_2018.pdf

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