Effects of Nitrogen Gas on the Growth of Magnesium Doped Indium Nitride Thin Films via Sol-gen Spin Coating Method

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Effects of Nitrogen Gas on the Growth of Magnesium Doped Indium Nitride Thin Films via Sol-gen Spin Coating Method

We report on the growth of magnesium doped indium nitride (InN Mg) thin films via sol-gel spin coating method followed by nitridation process. Special attention was paid to the effects of nitrogen (N2) gas on the nitridation process In this work , the nitridation processes were carried under ammonia...

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Bibliographic Details
Main Authors:	Lee, H. S., Ng, S. S., Yam, F. K.
Format:	Conference or Workshop Item
Language:	English
Published:	2017
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48805/ http://eprints.usm.my/48805/1/NG17_OP08.pdf%20done.pdf

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