Effects of Nitrogen Gas on the Growth of Magnesium Doped Indium Nitride Thin Films via Sol-gen Spin Coating Method
We report on the growth of magnesium doped indium nitride (InN Mg) thin films via sol-gel spin coating method followed by nitridation process. Special attention was paid to the effects of nitrogen (N2) gas on the nitridation process In this work , the nitridation processes were carried under ammonia...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48805/ http://eprints.usm.my/48805/1/NG17_OP08.pdf%20done.pdf |