Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering
This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray di...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Online Access: | http://eprints.usm.my/48795/ http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf |
| _version_ | 1848881256913174528 |
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| author | Bashir, Umar Hassan, Zainuriah Ahmed, Naser M. |
| author_facet | Bashir, Umar Hassan, Zainuriah Ahmed, Naser M. |
| author_sort | Bashir, Umar |
| building | USM Institutional Repository |
| collection | Online Access |
| description | This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass
and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and
nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray diffraction
(HRXRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and
energy dispersive X-ray spectroscopy (EDX). XRD results show the growth of polycrystalline wurtzite
films with varying peak intensities. The deposited films were annealed in nitrogen environment at
different temperatures ranging from 1 00°C to 400°C. The annealing was carried out for four hours and
the results were compared with pre-annealing samples. |
| first_indexed | 2025-11-15T18:16:08Z |
| format | Conference or Workshop Item |
| id | usm-48795 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:16:08Z |
| publishDate | 2016 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-487952021-04-07T07:18:27Z http://eprints.usm.my/48795/ Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering Bashir, Umar Hassan, Zainuriah Ahmed, Naser M. QC1-999 Physics This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and energy dispersive X-ray spectroscopy (EDX). XRD results show the growth of polycrystalline wurtzite films with varying peak intensities. The deposited films were annealed in nitrogen environment at different temperatures ranging from 1 00°C to 400°C. The annealing was carried out for four hours and the results were compared with pre-annealing samples. 2016-12-07 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf Bashir, Umar and Hassan, Zainuriah and Ahmed, Naser M. (2016) Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering. In: 3rd Meeting of Malaysia Nitrides Research Group (MNRG 2016). |
| spellingShingle | QC1-999 Physics Bashir, Umar Hassan, Zainuriah Ahmed, Naser M. Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title_full | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title_fullStr | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title_full_unstemmed | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title_short | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| title_sort | influence of annealing temperature on inn thin films grown by rf magnetron sputtering |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/48795/ http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf |