Studies of annealing impact on the morphological, opto-dielectric and mechanical behaviors of molybdenum-doped CrN coatings
In the present study, molybdenum doped chromium nitride coatings deposited onto silicon substrates via unbalanced magnetron sputtering, in as-deposited and annealed conditions, at 500–800 °C in steps of 100 °C, were studied to reveal their temperature dependent structural, morphological, optical and...
| Main Authors: | , , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019
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| Online Access: | http://psasir.upm.edu.my/id/eprint/82287/ http://psasir.upm.edu.my/id/eprint/82287/1/Studies%20of%20annealing%20impact%20on%20the%20morphological%2C%20opto-dielectric%20and%20mechanical%20behaviors%20of%20molybdenum-doped%20CrN%20coatings.pdf |