Analytical comparison for square, rectangular and circular diaphragms in MEMS applications
MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The paramet...
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| Format: | Conference or Workshop Item |
| Language: | English |
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IEEE
2010
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| Online Access: | http://psasir.upm.edu.my/id/eprint/69479/ http://psasir.upm.edu.my/id/eprint/69479/1/Analytical%20comparison%20for%20square%2C%20rectangular%20and%20circular%20diaphragms%20in%20MEMS%20applications.pdf |
| _version_ | 1848856419606986752 |
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| author | Khakpour, Reza Mansouri, Solmaz Rastegar Moghaddam Bahadorimehr, Alireza |
| author_facet | Khakpour, Reza Mansouri, Solmaz Rastegar Moghaddam Bahadorimehr, Alireza |
| author_sort | Khakpour, Reza |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The parameter optimization of diaphragm is the prime challenge due to achieve the best performance of the device. In this paper Displacement, Stress and Vibration analysis which affect on the operation of the diaphragm under pressures is considered. The different shapes of diaphragms (square, rectangular and circular shapes) are also play a significant role in operation in different applications. The purpose of this research is to design a framework to show which kind of diaphragm with what kind of parameters can be chosen for specific MEMS devices. |
| first_indexed | 2025-11-15T11:41:22Z |
| format | Conference or Workshop Item |
| id | upm-69479 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T11:41:22Z |
| publishDate | 2010 |
| publisher | IEEE |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-694792019-07-04T04:44:40Z http://psasir.upm.edu.my/id/eprint/69479/ Analytical comparison for square, rectangular and circular diaphragms in MEMS applications Khakpour, Reza Mansouri, Solmaz Rastegar Moghaddam Bahadorimehr, Alireza MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The parameter optimization of diaphragm is the prime challenge due to achieve the best performance of the device. In this paper Displacement, Stress and Vibration analysis which affect on the operation of the diaphragm under pressures is considered. The different shapes of diaphragms (square, rectangular and circular shapes) are also play a significant role in operation in different applications. The purpose of this research is to design a framework to show which kind of diaphragm with what kind of parameters can be chosen for specific MEMS devices. IEEE 2010 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/69479/1/Analytical%20comparison%20for%20square%2C%20rectangular%20and%20circular%20diaphragms%20in%20MEMS%20applications.pdf Khakpour, Reza and Mansouri, Solmaz Rastegar Moghaddam and Bahadorimehr, Alireza (2010) Analytical comparison for square, rectangular and circular diaphragms in MEMS applications. In: International Conference on Electronic Devices, Systems and Applications (ICEDSA2010), 12-13 Apr. 2010, Best Western Premier Sri Pacific Hotel, Kuala Lumpur, Malaysia. (pp. 297-299). 10.1109/ICEDSA.2010.5503057 |
| spellingShingle | Khakpour, Reza Mansouri, Solmaz Rastegar Moghaddam Bahadorimehr, Alireza Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title | Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title_full | Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title_fullStr | Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title_full_unstemmed | Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title_short | Analytical comparison for square, rectangular and circular diaphragms in MEMS applications |
| title_sort | analytical comparison for square, rectangular and circular diaphragms in mems applications |
| url | http://psasir.upm.edu.my/id/eprint/69479/ http://psasir.upm.edu.my/id/eprint/69479/ http://psasir.upm.edu.my/id/eprint/69479/1/Analytical%20comparison%20for%20square%2C%20rectangular%20and%20circular%20diaphragms%20in%20MEMS%20applications.pdf |