Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube g...
| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2012
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| Online Access: | http://psasir.upm.edu.my/id/eprint/45174/ http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf |
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| author | Lee, Mai Woon Md Razib, Nadia Teh, Aun Shih Bien, Daniel Chia Sheng Chen, Soo Kien Abdullah @ Ab. Aziz, Shahrul Azam |
| author_facet | Lee, Mai Woon Md Razib, Nadia Teh, Aun Shih Bien, Daniel Chia Sheng Chen, Soo Kien Abdullah @ Ab. Aziz, Shahrul Azam |
| author_sort | Lee, Mai Woon |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube growth duration of 20 minutes, growth was only achieved with thinner catalyst layers but when the growth duration was doubled, high density of CNTS were also observed with thicker catalyst layers with taller nanotubes formed. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island. |
| first_indexed | 2025-11-15T10:07:00Z |
| format | Conference or Workshop Item |
| id | upm-45174 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T10:07:00Z |
| publishDate | 2012 |
| publisher | IEEE |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-451742020-08-04T02:42:51Z http://psasir.upm.edu.my/id/eprint/45174/ Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications Lee, Mai Woon Md Razib, Nadia Teh, Aun Shih Bien, Daniel Chia Sheng Chen, Soo Kien Abdullah @ Ab. Aziz, Shahrul Azam In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube growth duration of 20 minutes, growth was only achieved with thinner catalyst layers but when the growth duration was doubled, high density of CNTS were also observed with thicker catalyst layers with taller nanotubes formed. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island. IEEE 2012 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf Lee, Mai Woon and Md Razib, Nadia and Teh, Aun Shih and Bien, Daniel Chia Sheng and Chen, Soo Kien and Abdullah @ Ab. Aziz, Shahrul Azam (2012) Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications. In: 10th IEEE International Conference on Semiconductor Electronics (ICSE 2012), 19-21 Sept. 2012, Grand Millenium Hotel, Kuala Lumpur. (pp. 14-17). 10.1109/SMElec.2012.6417080 |
| spellingShingle | Lee, Mai Woon Md Razib, Nadia Teh, Aun Shih Bien, Daniel Chia Sheng Chen, Soo Kien Abdullah @ Ab. Aziz, Shahrul Azam Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title | Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title_full | Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title_fullStr | Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title_full_unstemmed | Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title_short | Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications |
| title_sort | effect of co catalyst on pecvd growth of carbon nanotubes for nems applications |
| url | http://psasir.upm.edu.my/id/eprint/45174/ http://psasir.upm.edu.my/id/eprint/45174/ http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf |