An Experiment of Thick Film Force Sensor Using MEMS Simulation Software.
Force sensor (or pressure sensor) has gained increasing interest among the researchers. Using the Microelectromechanical Systems or MEMS technology, the size of the force sensor can be miniaturized and this ignites more possible application in the field of biomedical and robotic applications. Recent...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English English |
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2013
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| Online Access: | http://psasir.upm.edu.my/id/eprint/28441/ http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf |
| _version_ | 1848846118304088064 |
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| author | Jaafar, Haslina Isa, Maryam Hamidon, Mohd Nizar Shafie, Suhaidi Wan Hassan, Wan Zuha Hawary, Ahmad Faizul Chong, M. H. |
| author_facet | Jaafar, Haslina Isa, Maryam Hamidon, Mohd Nizar Shafie, Suhaidi Wan Hassan, Wan Zuha Hawary, Ahmad Faizul Chong, M. H. |
| author_sort | Jaafar, Haslina |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | Force sensor (or pressure sensor) has gained increasing interest among the researchers. Using the Microelectromechanical Systems or MEMS technology, the size of the force sensor can be miniaturized and this ignites more possible application in the field of biomedical and robotic applications. Recent researches show the application of force sensor on the prosthetic hand, an artificial limb connected to an amputated person. This paper presents on simulating the sensitivity of the thick film force sensor using IntelliSuite software. The force sensor is realized by using the piezoresistive material on the cantilever structure. There are three force sensor designs are simulated. Two of the designs are simulated using glass as substrate, and while the remaining one is of alumina substrate. The sensitivity simulated is much smaller compared to the estimations made using equations. The simulations show that the glass sensor fares better than the alumina sensor. If the substrate is the same, the sensor with the bigger dimension has better sensitivity. |
| first_indexed | 2025-11-15T08:57:37Z |
| format | Article |
| id | upm-28441 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-15T08:57:37Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-284412015-10-05T06:21:57Z http://psasir.upm.edu.my/id/eprint/28441/ An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. Jaafar, Haslina Isa, Maryam Hamidon, Mohd Nizar Shafie, Suhaidi Wan Hassan, Wan Zuha Hawary, Ahmad Faizul Chong, M. H. Force sensor (or pressure sensor) has gained increasing interest among the researchers. Using the Microelectromechanical Systems or MEMS technology, the size of the force sensor can be miniaturized and this ignites more possible application in the field of biomedical and robotic applications. Recent researches show the application of force sensor on the prosthetic hand, an artificial limb connected to an amputated person. This paper presents on simulating the sensitivity of the thick film force sensor using IntelliSuite software. The force sensor is realized by using the piezoresistive material on the cantilever structure. There are three force sensor designs are simulated. Two of the designs are simulated using glass as substrate, and while the remaining one is of alumina substrate. The sensitivity simulated is much smaller compared to the estimations made using equations. The simulations show that the glass sensor fares better than the alumina sensor. If the substrate is the same, the sensor with the bigger dimension has better sensitivity. 2013 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf Jaafar, Haslina and Isa, Maryam and Hamidon, Mohd Nizar and Shafie, Suhaidi and Wan Hassan, Wan Zuha and Hawary, Ahmad Faizul and Chong, M. H. (2013) An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. Journal of Theoretical and Applied Information Technology, 47 (3). pp. 902-910. ISSN 1992-8645 http://www.jatit.org/volumes/Vol47No3/fourtyseventh_volume_3_2013.php English |
| spellingShingle | Jaafar, Haslina Isa, Maryam Hamidon, Mohd Nizar Shafie, Suhaidi Wan Hassan, Wan Zuha Hawary, Ahmad Faizul Chong, M. H. An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title | An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title_full | An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title_fullStr | An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title_full_unstemmed | An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title_short | An Experiment of Thick Film Force Sensor Using MEMS Simulation Software. |
| title_sort | experiment of thick film force sensor using mems simulation software. |
| url | http://psasir.upm.edu.my/id/eprint/28441/ http://psasir.upm.edu.my/id/eprint/28441/ http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf |