An Experiment of Thick Film Force Sensor Using MEMS Simulation Software.

An Experiment of Thick Film Force Sensor Using MEMS Simulation Software.

Force sensor (or pressure sensor) has gained increasing interest among the researchers. Using the Microelectromechanical Systems or MEMS technology, the size of the force sensor can be miniaturized and this ignites more possible application in the field of biomedical and robotic applications. Recent...

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Bibliographic Details
Main Authors: Jaafar, Haslina, Isa, Maryam, Hamidon, Mohd Nizar, Shafie, Suhaidi, Wan Hassan, Wan Zuha, Hawary, Ahmad Faizul, Chong, M. H.
Format: Article
Language:English
English
Published: 2013
Online Access:http://psasir.upm.edu.my/id/eprint/28441/
http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf

Internet

http://psasir.upm.edu.my/id/eprint/28441/
http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf

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