Growth kinetic and composition of the interfacial layer for RF sputtering Al2O3 layer on germanium

QR Code

Growth kinetic and composition of the interfacial layer for RF sputtering Al2O3 layer on germanium

Purpose – The quality of GeOx–Ge interface and the equivalent oxide thickness (EOT) are the main issues in fabricating high-k/Ge gate stack due to the low-k of GeOx interfacial layer (IL). Therefore, a precise study of the formation of GeOx IL and its contribution to EOT is of utmost importance. I...

Full description

Bibliographic Details
Main Authors:	Siti Kudnie, Sahari, Muhammad, Kashif, Norsuzailina, Mohamed Sutan, Zaidi, Embong, Nik Amni Fathi, Nik Zaini Fathi, Azrul Azlan, Hamzah, Rohana, Sapawi, Burhanuddin, Yeop Majlis, Ibrahim, Ahmad
Format:	Article
Language:	English
Published:	Emerald Publishing Limited 2017
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://ir.unimas.my/id/eprint/16683/ http://ir.unimas.my/id/eprint/16683/1/Sahari.pdf

Similar Items

Wet chemical cleaning effect on the formation of ultrathin interfacial layer between Germanium (Ge) and high-k dielectric
by: Siti Kudnie, Sahari, et al.
Published: (2015)

Effects of post-deposition annealing temperatures on the composition of interfacial layer at germanium (Ge) /aluminium oxide (Al2O3)
by: Siti Kudnie Sahari,, et al.
Published: (2019)

Stability of Chlorine Termination on Ge(100) and Ge(111) Surfaces
by: Siti Kudnie, Sahari, et al.
Published: (2017)

Formation of germanium oxynitride as buffer layer on germanium substrate / Soh Wee Chen
by: Soh, Wee Chen
Published: (2018)

Fabrication of dual- and single-layer piezoresistive microcantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Design analysis of single layer coupled coils
by: Yunas, Jumril, et al.
Published: (2010)

Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Bi-layered model of interfacial thermal stresses with the effect of different temperatures in the layers
by: Debnath, Sujan, et al.
Published: (2011)

Improved tri-layered interfacial stress model with the effect of different temperatures in the layers
by: Debnath, Sujan
Published: (2010)

Material Selection for Interfacial Bond Layer in Electronic Packaging
by: Debnath, Sujan, et al.
Published: (2018)

Structural and optical properties of RF-sputtered Ge thin films using magnetron sputtering technique
by: Ariffin, Nurul Assikin
Published: (2018)

Effect of Substrate Orientation on the Growth of Germanium Oxide in Dry Oxygen Ambience
by: Sahari, S.K., et al.
Published: (2017)

Deposition and characterisation of RF magnetron sputtered phosphate based glasses
by: Stuart, Bryan W.
Published: (2017)

RF magnetron sputtered YSZ thin film: Fabrication and characterizations
by: Meskon, Shahrul Razi, et al.
Published: (2010)

Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
by: Zakaria, Mohd Hazrul, et al.
Published: (2012)

Metal oxide semiconducting interfacial layers for photovoltaic and photocatalytic applications
by: Elumalai, Naveen Kumar, et al.
Published: (2015)

Metal Oxide Semiconducting Interfacial Layers for Photovoltaic and Photocatalytic Applications
by: Naveen, Kumar Elumalai, et al.
Published: (2015)

Interfacial elastic relaxation during the ejection of bi-layered tablets
by: Anuar, Mohd Shamsul, et al.
Published: (2010)

Microstructure and electrical properties of AZO films prepared by RF magnetron sputtering
by: Bakri, Jufriadi, et al.
Published: (2011)

Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
by: Sutjipto, Agus Geter Edy, et al.
Published: (2011)

GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications
by: Sheikh Sarmast, Hadi Mahmodi
Published: (2017)

Fabrication of smart glass electrochromic device using rf magnetron sputtering
by: Abdullah, Siti Ashraf
Published: (2014)

Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
by: J. Karamdel,, et al.
Published: (2011)

Effect of the processing parameters on the integrity of calcium phosphate coatings produced by RF-magnetron sputtering
by: Toque, Jay Arre, et al.
Published: (2009)

Magnetic Properties of Rf Magnetron Sputtered Co-Ag-Cu Granular Thin Films
by: Kabashi, Kabashi Khatir
Published: (2000)

Effect on silicon nitride thin films properties at various powers of RF magnetron sputtering
by: Mustafa, Mohd Kamarulzaki, et al.
Published: (2018)

Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering
by: Bashir, Umar, et al.
Published: (2016)

Hydrophobic Polytetrafluoroethylene (PTFE) Coating On Endoscopic Lenses Via RF Magnetron Sputtering Method
by: Saudi, Nabilah
Published: (2022)

Effects of rf power on structural properties of Nc-Si:H thin films deposited by layer-by-layer (LbL) deposition technique
by: Goh, Boon Tong, et al.
Published: (2012)

Stress and deformation of optimally shaped silicon microneedles for transdermal drug delivery
by: Zainal Abidin, Hafzaliza Erny, et al.
Published: (2020)

Fabrication of titania-based memristive device using RF magnetron sputtering method / Aznilinda Zainuddin
by: Zainodin @ Zainuddin, Aznilinda
Published: (2014)

Growth Of Gan Films On Gaas (100) Substrate By Rf-Sputtering And E-Beam Evaporation Techniques
by: Md Taib, Muhamad Ikram
Published: (2016)

Fabrication and Characterization of Cu-doped ZnO Films using rf Reactive Magnetron Sputtering
by: Yusof, A. S., et al.
Published: (2017)

Fabrication and Characterization of Cu-doped ZnO Films Using RF Reactive Magnetron Sputtering
by: Yusof, A. S., et al.
Published: (2017)

Mitigation of oxygen presence in AlN (100) & (002) growth using RF magnetron sputtering
by: Bakri, Anis Suhaili
Published: (2022)

Interfacial engineering of hole transport layers with metal and dielectric nanoparticles for efficient perovskite solar cells
by: Wang, D., et al.
Published: (2017)

On the Thermally Induced Interfacial Behavior of Thin Two-Dimensional Hexagonal Quasicrystal Films with an Adhesive Layer
by: Dang, H., et al.
Published: (2024)

Interfacial fracture analysis for a two-dimensional decagonal quasi-crystal coating layer structure
by: Zhao, M., et al.
Published: (2021)

On the interfacial behavior of two-dimensional decagonal quasicrystal films with an adhesive layer due to thermal misfit
by: Dang, H.Y., et al.
Published: (2024)

Characterization of AlInN layer grown on GaN/Sapphire substrate by MOCVD
by: Wei-Ching Huang,, et al.
Published: (2013)