A Numerical Approach to the Efficient Analysis of2D RF-MEMS Capacitor with Accelerated Motion

The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the cou...

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Bibliographic Details
Main Authors: Shafrida, Sahrani, Mohd Shahril, Osman, Michiko, Kuroda
Format: Article
Language:English
Published: IEEE 2009
Subjects:
Online Access:http://ir.unimas.my/id/eprint/16558/
http://ir.unimas.my/id/eprint/16558/1/A%20Numerical%20Approach%20to%20the%20Efficient%20Analysis%20of2D%20RF-MEMS%20Capacitor%28abstract%29.pdf