A Numerical Approach to the Efficient Analysis of2D RF-MEMS Capacitor with Accelerated Motion
The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the cou...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2009
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| Subjects: | |
| Online Access: | http://ir.unimas.my/id/eprint/16558/ http://ir.unimas.my/id/eprint/16558/1/A%20Numerical%20Approach%20to%20the%20Efficient%20Analysis%20of2D%20RF-MEMS%20Capacitor%28abstract%29.pdf |