Rapid Direct Continuous Method for Hot Embossing of Glass Microlens Array Combined with CO2 Laser Irradiation and External Preheating/Cooling
Hot embossing of glass micro structures requires long thermal cycle, generally takes no less than 15 min due to the isothermal heating, pressing and cooling performed inside a closed vacuum chamber. In this paper, a new hot embossing procedure was presented. First, the glass was preheated slightly b...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Springer, Singapore
2021
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/36989/ http://umpir.ump.edu.my/id/eprint/36989/1/Rapid%20Direct%20Continuous%20Method%20for%20Hot%20Embossing1.pdf |