Modeling of micro-diaphragm for optical pressure sensor for human artery pulse wave detection / Khairunnisa Hasikin

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Modeling of micro-diaphragm for optical pressure sensor for human artery pulse wave detection / Khairunnisa Hasikin

This thesis presents the development of a micro-diaphragm for an optical pulse pressure sensor using Micro-electro-mechanical Systems (MEMS) technology. Modelling of the micro-diaphragm was conducted and the comparison of its performance was simulated for silicon nitride and polyirnide materials. In...

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Bibliographic Details
Main Author:	Khairunnisa , Hasikin
Format:	Thesis
Published:	2010
Subjects:	QA75 Electronic computers. Computer science
Online Access:	http://studentsrepo.um.edu.my/9781/ http://studentsrepo.um.edu.my/9781/1/Khairunnisa_Hasikin_%2D_Academic_exercise.pdf

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